ＬＩＺｕｏｗｅｎ ＨＵＡＮＧＸｉｎ ＬＩＡＯＢｉｎ ＣＡＯ Ｗａｎｇ ＺＨＯＵＦｕｚｅｎｇ ＦＵ Ｋａｉｈｕ ＺＨＯＵ Ｈａｎ ＺＨＡＮＧＸｕ. Effect of gas flow rate on nc-ZrC/a-C:H composite films deposited by filitered cathodi vacuum are technology[J]. Journal of Beijing Normal University(Natural Science), 2014, 50(6): 609.
Citation: ＬＩＺｕｏｗｅｎ ＨＵＡＮＧＸｉｎ ＬＩＡＯＢｉｎ ＣＡＯ Ｗａｎｇ ＺＨＯＵＦｕｚｅｎｇ ＦＵ Ｋａｉｈｕ ＺＨＯＵ Ｈａｎ ＺＨＡＮＧＸｕ. Effect of gas flow rate on nc-ZrC/a-C:H composite films deposited by filitered cathodi vacuum are technology[J]. Journal of Beijing Normal University(Natural Science), 2014, 50(6): 609.
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